JPS6225319Y2 - - Google Patents
Info
- Publication number
- JPS6225319Y2 JPS6225319Y2 JP1983073262U JP7326283U JPS6225319Y2 JP S6225319 Y2 JPS6225319 Y2 JP S6225319Y2 JP 1983073262 U JP1983073262 U JP 1983073262U JP 7326283 U JP7326283 U JP 7326283U JP S6225319 Y2 JPS6225319 Y2 JP S6225319Y2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- suction
- holder
- holders
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000033001 locomotion Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Feeding Of Workpieces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983073262U JPS59183328U (ja) | 1983-05-17 | 1983-05-17 | 研削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983073262U JPS59183328U (ja) | 1983-05-17 | 1983-05-17 | 研削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59183328U JPS59183328U (ja) | 1984-12-06 |
JPS6225319Y2 true JPS6225319Y2 (en]) | 1987-06-29 |
Family
ID=30203391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1983073262U Granted JPS59183328U (ja) | 1983-05-17 | 1983-05-17 | 研削装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59183328U (en]) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62188655A (ja) * | 1986-02-10 | 1987-08-18 | Mitsubishi Metal Corp | ウエ−ハの外周研削装置 |
JPS62188656A (ja) * | 1986-02-10 | 1987-08-18 | Mitsubishi Metal Corp | ウエ−ハの外周研削装置 |
JPH0775812B2 (ja) * | 1987-02-27 | 1995-08-16 | 日本板硝子株式会社 | 搬送加工装置 |
JPH067885Y2 (ja) * | 1988-04-05 | 1994-03-02 | マツダ株式会社 | 研削盤の被加工物支持装置 |
-
1983
- 1983-05-17 JP JP1983073262U patent/JPS59183328U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59183328U (ja) | 1984-12-06 |
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